Semiconductor Cluster Tools

Related Business Topics

Recycling and Destruction of Electronic Scrap	Photovoltaic Cells	Electronic Components
RF Transmitters/Receivers	Light-Emitting Diode (LED)	Printed Circuit Boards (PCBs)
Electronic Simulation Software	Electronic Connectors	Multimeters
Electronic Components Distributors	Audio Analyzers

Web Listings

Steady-State Throughput and Scheduling Analysis of Multi-Cluster ...
Abstract—Cluster tools are widely used as semiconductor manufacturing equipment. ...... ysis of a multi-cluster tool for semiconductor manufacturing. ...
http://faculty.cs.tamu.edu/dzsong/pdfs/Jingang_icra2005_v9.pdf

Semiconductor production system, cluster tool, control method of ...
May 6, 2008 ... PS control sections MC1, MC2 configured to independently control the operations in process ships PS1, PS2 are provided respectively, ...
http://www.freepatentsonline.com/7367769.html

Rotating susceptor semiconductor wafer processing cluster tool ...
A semiconductor wafer processing apparatus or module for a cluster tool is provided with a single wafer rotating susceptor that thins the gas boundary layer ...
http://www.freepatentsonline.com/5370739.html

Helium recovery from semiconductor cluster tools
Systems for the recovery of rare gas from a mixed gas stream are described. In particular, systems for the recovery of helium from cluster tools used in ...
http://www.freshpatents.com/-dt20090723ptan20090185969.php

HELIUM RECOVERY FROM SEMICONDUCTOR CLUSTER TOOLS - Patent application
In particular, systems for the recovery of helium from cluster tools used in semiconductor fabrication are described. In one embodiment, these systems allow ...
http://www.faqs.org/patents/app/20090185969

Semiconductor Cluster Tool Market Still Divided on Standards, Says ...
SEMI's Cluster tool standards for semiconductor vacuum operations are still being ignored in the industry, according to a market study by The Information ...
http://vendor.tekrati.com/research/7985/

DSpace@MIT : Semiconductor cluster tool availability
Title: Semiconductor cluster tool availability. Author: Bailey, Troy A. Advisor: James E. Chung. Department: Massachusetts Institute of Technology. ...
http://dspace.mit.edu/handle/1721.1/12020

A review of scheduling theory and methods for semiconductor ...
Systems of multiple cluster tools: Configuration and performance under perfect reliability. IEEE Transactions on Semiconductor Manufacturing 11 (3): ...
http://portal.acm.org/citation.cfm?id=1517115

Optessa
Semiconductor cluster tools are typical tools used in semiconductor manufacturing. A semiconductor cluster tool is comprised of several different wafer ...
http://www.netaps.com/industries_semi.htm

A REVIEW OF SCHEDULING THEORY AND METHODS FOR SEMICONDUCTOR ...
progress in tool science and engineering for scheduling and control of cluster tools. 1. INTRODUCTION. The semiconductor manufacturing industry has made con ...
http://www.informs-sim.org/wsc08papers/263.pdf

Wlodek M. Zuberek -- publications: 04-IEEE-a
M.J. Lopez and S.C. Wood, "Systems of multiple cluster tools: configuration, and performance under perfect reliability"; IEEE Trans. on Semiconductor ...
http://www.cs.mun.ca/~wlodek/abstracts/04-IEEE-a.html

CiteSeerX — Using Simulation and Genetic Algorithms to Improve ...
Keywords: Semiconductor Manufacturing, Cluster Tools, Sequencing, Genetic Algorithms. 1 Introduction Cluster tools have gained importance in the fabrication ...
http://citeseer.ist.psu.edu/190280.html

Cluster Tool Simulation Assists the System Design, from Institute ...
Overview: Designing semiconductor cluster tool systems is a complicated task due to the nature of automatic operations and various configurations of modules ...
http://jobfunctions.bnet.com/abstract.aspx?docid=135756

Cluster tool for fabricating semiconductor device - US Patent ...
The present invention relates to a equipment for fabricating a semiconductor device, and more particularly to a cluster tool having a wafer cooling ...
http://www.patentstorm.us/patents/6530993/description.html

WSC 2005 WSC 2005 Final Program
Cluster tools have gained a lot of importance in today's semiconductor manufacturing. A cluster tool basically consists of several processing chambers in a ...
http://www.wintersim.org/abstracts05/SM.htm

Research INTELLIGENCE: Novel cluster tool
THE UNIVERSITY OF LIVERPOOLwill soon be installing a semiconductor processing cluster tool, believed to be the first of its kind in a UK university. ...
http://www.liv.ac.uk/researchintelligence/issue1/cluster.html

Press Release: Varian MB2 Cluster Tool to Albany-SUNY for ...
Article: Varian MB2 Cluster Tool to Albany-SUNY for Semiconductor Metallization Research; NY State Center for Advanced Thin Film Technology to Benchmark ...
http://www.highbeam.com/doc/1G1-18672766.html

Capabilities and Vertical Disintegration in Process Technology ...
This paper presents a detailed case study of the cluster-tool segment of the American semiconductor-equipment industry. That industry has embarked upon a ...
http://ideas.repec.org/p/wpa/wuwpio/9406004.html

Flipkart.com: Development And Assessment Of Wafer Transport ...
Commercially available simulation programs for semiconductor cluster tools are limited in the variety of sequencing rules and do not support such an ...
http://www.flipkart.com/development-assessment-wafer-transport-sequencing/3639032543...

Cluster tool simulation assists the system design - Simulation ...
Designing semiconductor cluster tool systems is a complicated task due to the nature of automatic operations and various configurations of modules and task ...
http://doi.ieeecomputersociety.org/10.1109/WSC.2000.899123

Semiconductor Cluster Tools - Web Listings

Recent Questions

Ask a Business Question