If your company produces semiconductor wafers, you know that chemical mechanical polishing is more crucial to performance than ever. Technological advances such as the continued miniaturization of features make chemical mechanical planarization requirements increasingly stringent. Because chemical mechanical polishing (CMP) is so important, many companies provide CMP equipment and chemicals and will complete the entire chemical mechanical polishing process to prepare your wafers.

Chemical mechanical polishing helps you make defect-free integrated-circuit semiconductor wafers using a chemical, called a slurry, and the scrubbing action of abrasives. To improve the process, over the years companies have developed proprietary slurries and refined the chemical mechanical polisher.

A range of chemical mechanical polishing services is available. To learn about each chemical mechanical polish service, do the following:

1. Scour online sources for companies that provide chemical mechanical polishing services.

2. Analyze what each chemical mechanical planarization business has to offer.

3. Select a chemical mechanical planarization company that fits your particular needs

Action Steps
The best contacts and resources to help you get it done

Create a list of companies that provide chemical mechanical polishing services

As you investigate each chemical mechanical planarization business, make a list of the services each provides. You will find makers and distributors of polishing chemicals, pads and machines as well as companies that offer complete CMP services.

I recommend: Applied Materials is a leading name in the semiconductor business. They provide a range of products and services, from polishing materials and apparatus to consultation. Entrepix offers Fast Forward, a complete chemical mechanical planarization process. It also provides wafers ready for processing.

Select a CMP chemical mechanical polishing slurry

Once you review the chemical slurries available, select one or more providers. Note that different makers promote slurries of various compositions. Review specifications and consult with providers to find the service that best fits your business plan.

I recommend: Cabot Microelectronics supplies polishing pads and chemicals, including tungsten, copper, aluminum and dielectric slurries. You can get a water-based silica polishing slurry at DA NanoMaterials. The low metal content of the slurry is ideal for polishing silicon wafers.

Engage a chemical mechanical polishing service

Although chemical mechanical polishing has been around for several decades, there has been constant refinement in the polishing machines and chemicals. You can find equipment to upgrade your chemical mechanical polishing machine and software to run it.

I recommend: Equipment-maker Lapmaster International provides precision polishing and grinding machinery. Check its inventory for the latest designs. CMP Technology has introduced a software package to manage your chemical mechanical polishing process. The CLIP package guides each step in your chemical mechanical planarization.

Tips & Tactics

Helpful advice for making the most of this Guide

• •  Chemical mechanical polishing slurries come in a variety of compositions. Make sure the slurry you choose has been tested on the wafers you produce to make sure it will provide optimum planarization.