Wafer Handling Equipment for Semiconductors Key Terms

Familiarize yourself with semiconductor wafer handling equipment terminology

By Howard Robertson

In the semiconductor manufacturing industry, wafer is a critical component, as it forms the substrate for creating electronic circuits and performing other processes. It is important for manufacturers to use reliable wafer handling equipment while moving the wafers from one process to another. A variety of wafer handling equipment is available in the market for different applications.

This guide will introduce you to some key terms related to semiconductor wafer handling equipment, such as vacuum wands, tweezers, vacuum pens, cassettes and clean room robots.

Vacuum wands

A vacuum wand is a useful and reliable tool that can pick up a wide range of wafers. Vacuum wands can have tips of steel or other materials and have nozzles and suction cups as per the application requirements.
Try: You can read through the definition of vacuum wand in the glossary at M+W Zander, a provider of industrial solutions.

Titanium tweezers

Titanium tweezers or wands are non-magnetic, non-corrosive and heat-resistant tools that are very useful in handling silicon chips or wafers. In titanium tweezers, the solder does not stick to the tip of the tweezers, making it a great choice.
Try: You can learn more about titanium tweezers at Ted Pella, Inc., a manufacturer of microscopy products. You can also find useful information on tweezers at Excelta Corporation, supplier of precision hand tools.

ESD protection

Wafers can get electrostatic discharge protection through tools such as ESD safe tubes. These tubes can suppress the voltage and protect circuits during transit from one place to another.
Try: You can learn more about ESD protection at Semtech Corporation, a leading supplier of semiconductor products.

Vacuum pens

A vacuum pen operates on the principle of suction and it can handle semi-conductor wafers delicately. Air pincette is another name by which vacuum pens are popular.
Try: For further explanation about vacuum pens, read through information at Yonsha, a manufacturer of vacuum equipment.

Cassettes

A wafer handling cassette is a tool that is mounted over wafer frames and can hold up to 25 wafers. It is usually made of polypropylene or teflon. The cassette design allows uniform distribution of heat over the wafer surface.
Try: You can find the definition of the cassette at the glossary at IC Knowledge, a knowledge provider for the semiconductor industry.

Clean room robots

Clean room robots are useful in the semiconductor industry due to their ability of handling fragile and complex components, such as wafers and chips.
Try: You can get more information about clean room robots at Robotics Online, a website that provides information about robotics and automation.